Controlled-Growth of Film Using Modified Low-Fluorine Chemical Solution Deposition

Various precursor solutions with different fluorine content have been developed, including the conventional low-fluorine (CLF) solution with fluorine content of 54% (F-54%), the super low-fluorine (SLF) solution with F-31% and the extreme low-fluorine (ELF) solution with F-7% in contrast to the all trifluoroacetates (All-TFA) solution with F-100%. The DTA analysis shows that the precursor solution with lower fluorine content endures a faster pyrolysis rate. The influence of pyrolysis rate on the microstructure and transport properties of YBa₂Cu₃O_7-δ (YBCO) films prepared by various low-fluorine (LF) solutions was investigated, revealing that smooth and homogeneous YBCO films can be achieved with high-rate decomposition process in the case of LF solutions. Also, high-performance YBCO films can be obtained at 5 °C/min using CLF solution or 20 °C/min using ELF solution. Subsequently, the superconducting properties and production rate of YBCO film are improved effectively in the case of various LF solutions, suggesting a promising route to scale up and rapid preparation of YBCO coated conductors.