Microstructure methane sensor based on Pd-doped SnO2 nanoparticles

SnO2 nanomaterials were synthesized by an ultrasonic assisted precipitation method, and then Pd was doped on SnO2 by mechanical mixing method. SnO2 materials were characterized by X-ray diffraction. The micro-hotplate was used as the substrate of the sensor. Finally, the sensing properties were evaluated with a static state measuring system. It has been observed that the response of the microstructure sensor based on 1wt% Pd-doped SnO2 exhibited a preferable sensing performance. The response to 3000ppm methane was about 33 at 275 °C and the response and recovery time was about 1 s and 3 s, respectively.