• DocumentCode
    568949
  • Title

    Effect of Barium Titanate buffer layer on dielectric properties of Sodium Bismuth Titanate thin films grown using Pulsed Laser Deposition

  • Author

    Daryapurkar, A.S. ; Kolte, J.T. ; Gopalan, Parikshit

  • Author_Institution
    Dept. of Metall. Eng. & Mater. Sci., Indian Inst. of Technol. Bombay, Mumbai, India
  • fYear
    2012
  • fDate
    9-13 July 2012
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Lead free bilayer capacitor structure has been fabricated as a combination of Sodium Bismuth Titanate, (Na0.5Bi0.5)TiO3 (NBT) thin films with Barium Titanate, (BaTiO3) (BT) buffer layer in situ using Pulsed Laser Deposition (PLD). PLD control parameters have been optimized using Taguchi approach to obtain good quality NBT and BT thin films. In order to understand the effect of buffer layer on the structural and dielectric properties of NBT thin films, 50 nm thickness of BT buffer layer has been grown on Pt coated Si substrate. It has been found that dielectric constant and dielectric loss of NBT thin films is 735 and 0.07 at 1 kHz respectively. It is observed that dielectric properties of NBT thin films enhanced by inserting BT buffer layer. This improvement in the dielectric properties of NBT thin films have been discussed in relation to the effect of the buffer layer on the structure, microstructure and interface of the NBT/BT bilayer capacitor.
  • Keywords
    Taguchi methods; barium compounds; bismuth compounds; crystal microstructure; dielectric losses; dielectric thin films; ferroelectric capacitors; permittivity; pulsed laser deposition; sodium compounds; thin film capacitors; (Na0.5Bi0.5)TiO3-BaTiO3-Pt-TiO2-SiO2-Si; PLD control parameters; Taguchi approach; barium titanate buffer layer; dielectric constant; dielectric loss; dielectric properties; frequency 1 kHz; lead free bilayer capacitor structure; microstructural properties; pulsed laser deposition; size 50 nm; sodium bismuth titanate thin films; Bismuth; Buffer layers; Capacitors; Dielectric constant; Silicon; Substrates; Dielectric; SIMS; Sodium Bismuth Titanate; Thin film;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 Intl Symp
  • Conference_Location
    Aveiro
  • Print_ISBN
    978-1-4673-2668-1
  • Type

    conf

  • DOI
    10.1109/ISAF.2012.6297774
  • Filename
    6297774