DocumentCode
568949
Title
Effect of Barium Titanate buffer layer on dielectric properties of Sodium Bismuth Titanate thin films grown using Pulsed Laser Deposition
Author
Daryapurkar, A.S. ; Kolte, J.T. ; Gopalan, Parikshit
Author_Institution
Dept. of Metall. Eng. & Mater. Sci., Indian Inst. of Technol. Bombay, Mumbai, India
fYear
2012
fDate
9-13 July 2012
Firstpage
1
Lastpage
4
Abstract
Lead free bilayer capacitor structure has been fabricated as a combination of Sodium Bismuth Titanate, (Na0.5Bi0.5)TiO3 (NBT) thin films with Barium Titanate, (BaTiO3) (BT) buffer layer in situ using Pulsed Laser Deposition (PLD). PLD control parameters have been optimized using Taguchi approach to obtain good quality NBT and BT thin films. In order to understand the effect of buffer layer on the structural and dielectric properties of NBT thin films, 50 nm thickness of BT buffer layer has been grown on Pt coated Si substrate. It has been found that dielectric constant and dielectric loss of NBT thin films is 735 and 0.07 at 1 kHz respectively. It is observed that dielectric properties of NBT thin films enhanced by inserting BT buffer layer. This improvement in the dielectric properties of NBT thin films have been discussed in relation to the effect of the buffer layer on the structure, microstructure and interface of the NBT/BT bilayer capacitor.
Keywords
Taguchi methods; barium compounds; bismuth compounds; crystal microstructure; dielectric losses; dielectric thin films; ferroelectric capacitors; permittivity; pulsed laser deposition; sodium compounds; thin film capacitors; (Na0.5Bi0.5)TiO3-BaTiO3-Pt-TiO2-SiO2-Si; PLD control parameters; Taguchi approach; barium titanate buffer layer; dielectric constant; dielectric loss; dielectric properties; frequency 1 kHz; lead free bilayer capacitor structure; microstructural properties; pulsed laser deposition; size 50 nm; sodium bismuth titanate thin films; Bismuth; Buffer layers; Capacitors; Dielectric constant; Silicon; Substrates; Dielectric; SIMS; Sodium Bismuth Titanate; Thin film;
fLanguage
English
Publisher
ieee
Conference_Titel
Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 Intl Symp
Conference_Location
Aveiro
Print_ISBN
978-1-4673-2668-1
Type
conf
DOI
10.1109/ISAF.2012.6297774
Filename
6297774
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