DocumentCode
569889
Title
Magnetically controlled MEMS switches with nanoscale contact coatings
Author
Karabanov, S.M. ; Karabanov, A.S. ; Suvorov, D.V. ; Grappe, Benoit ; Coutier, Caroline ; Sibuet, H. ; Sazhin, B.N.
Author_Institution
Ryazan Metal Instrum. Plant JSC, Ryazan, Russia
fYear
2012
fDate
14-17 May 2012
Firstpage
359
Lastpage
361
Abstract
The paper reports the tests results of ruthenium contacts coatings of magnetically controlled MEMS switches. During the tests the contact resistance was measured and the lifetime of MEMS switches was evaluated. After testing the analysis of the form and contact surface structure using SEM-method was carried out. The experiment results showed that the application of ruthenium nanolayers as the contact coating at slight increase of the contact resistance improves the lifetime of MEMS switches considerably.
Keywords
coatings; contact resistance; microswitches; nanotechnology; ruthenium; scanning electron microscopy; SEM-method; contact resistance; contact surface structure; magnetically controlled MEMS switches; nanoscale contact coatings; ruthenium contacts coatings; ruthenium nanolayers; coatings; nanotechnology; switches;
fLanguage
English
Publisher
iet
Conference_Titel
Electrical Contacts (ICEC 2012), 26th International Conference on
Conference_Location
Beijing
Electronic_ISBN
978-1-84919-508-9
Type
conf
DOI
10.1049/cp.2012.0675
Filename
6301920
Link To Document