Title :
Study of YBCO thin films deposited by intense pulsed light ion beam evaporation
Author :
Grigoriu, Constantin ; Chamdani, E.P.Achmad ; Miu, Dana ; Masugata, Katsumi ; Yatsui, Kiyoshi
Author_Institution :
Laboratory of Beam Technology, Nagaoka University of Technology, Niigata 9-10-21, Japan
Abstract :
The present report describes deposition of YBa2Cu3O7−x (YBCO) thin films by intense pulsed ion beam evaporation (IBE). Standard deposition configuration (front side deposition, IBE/FS), is compared with a new proposed one, back side deposition (IBE/BS). This method has proven valuable for improving the film morphologies and stoichiometry.
Conference_Titel :
High-Power Particle Beams, 1996 11th International Conference on
Conference_Location :
Prague, Czech Republic
Print_ISBN :
978-80-902250-3-9
