Thermal micro flow sensor

Author

Tanaka, Hiroaki ; Terao, Minako ; Tanaka, Yoshiaki

Author_Institution

Innovation Headquarter, Yokogawa Electr. Corp., Tokyo, Japan

fYear

2012

fDate

20-23 Aug. 2012

Firstpage

10

Lastpage

15

Abstract

The micro flow sensor was developed. The flow sensor is corrosion resistant owing to making all wetted surfaces as glass and placing sensing elements in non-wetted areas by MEMS process. On response to user needs, measurable high flowrate range was expanded by Time-of-Flight method and the flow sensor was downsized. Original flow sensor fulfilled targeted accuracy in high flowrate range while downsized flow sensor also fulfilled the accuracy in low flowrate range. The channel length is crucial to determine the accuracy. Evaluation results of multiple number of the flow sensor assure a large-lot production. Various organic solvents were confirmed usable.

Keywords

flow sensors; microsensors; organic compounds; thermometers; MEMS process; channel length; large-lot production; nonwetted areas; organic solvents; sensing elements; thermal microflow sensor; time-of-flight method; wetted surfaces; Accuracy; Glass; Heating; Semiconductor device measurement; Solvents; Temperature measurement; Temperature sensors; Liquid flow; Micro flow sensor; Micro reactor system; Thermal flow sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

SICE Annual Conference (SICE), 2012 Proceedings of

Conference_Location

Akita

ISSN

pending

Print_ISBN

978-1-4673-2259-1

Type

conf

Filename

6318396