DocumentCode
577412
Title
Manufacturing of regular microstructures by methods of LIGA — Technologies
Author
Aumalikova, M.N. ; Timchenko, N. -É ; Kuznetsov, S.I. ; Goldenberg, B.G. ; Pindurin, V.F. ; Litvin, S.V. ; Kanaev, V.G.
Author_Institution
Tomsk Polytechnic University, Tomsk, Russia
fYear
2012
fDate
18-21 Sept. 2012
Firstpage
1
Lastpage
4
Abstract
The results of the work on the creation of regular microstructures using deep x-ray lithography with synchrotron radiation are presented. The characteristics of the main processes of supporting membranes formation, absorbing layers and topological templates, as well as the results of measurements of the resulting structures when exposed to the channel of synchrotron radiation are presented.
Keywords
LIGA; crystal microstructure; membranes; synchrotron radiation; LIGA technology; absorbing layers; deep x-ray lithography; membranes formation; regular microstructure manufacturing; synchrotron radiation; topological templates; Biomembranes; Etching; Gold; Resists; Silicon; Silicon compounds; LIGA-technology; deep x-ray lithography; regular microstructures;
fLanguage
English
Publisher
ieee
Conference_Titel
Strategic Technology (IFOST), 2012 7th International Forum on
Conference_Location
Tomsk
Print_ISBN
978-1-4673-1772-6
Type
conf
DOI
10.1109/IFOST.2012.6357553
Filename
6357553
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