Title :
CMOS compatible subwavelength grating couplers for silicon integrated photonics
Author :
Xu, Xiaochuan ; Subbaraman, Harish ; Covey, John ; Kwong, David ; Hosseini, Amir ; Chen, Ray T.
Author_Institution :
Microelectron. Res. Center, Univ. of Texas at Austin, Austin, TX, USA
Abstract :
We demonstrate a through etched subwavelength grating coupler, which can be patterned together with other photonic components. It achieves a very high coupling efficiency of 59% with a 3dB bandwidth of 60 nm.
Keywords :
CMOS integrated circuits; diffraction gratings; elemental semiconductors; etching; integrated optics; optical couplers; optical fabrication; silicon; CMOS compatible-subwavelength grating couplers; Si; Silicon Integrated Photonics; efficiency 59 percent; etching; high-coupling efficiency; noise figure 3 dB; photonic components; wavelength 60 nm; Couplers; Couplings; Fabrication; Gratings; Photonics; Silicon; gratings; nanophotonics and photonic crystals; subwavelength structure;
Conference_Titel :
Photonics Conference (IPC), 2012 IEEE
Conference_Location :
Burlingame, CA
Print_ISBN :
978-1-4577-0731-5
DOI :
10.1109/IPCon.2012.6358636
