DocumentCode
577945
Title
CMOS compatible subwavelength grating couplers for silicon integrated photonics
Author
Xu, Xiaochuan ; Subbaraman, Harish ; Covey, John ; Kwong, David ; Hosseini, Amir ; Chen, Ray T.
Author_Institution
Microelectron. Res. Center, Univ. of Texas at Austin, Austin, TX, USA
fYear
2012
fDate
23-27 Sept. 2012
Firstpage
350
Lastpage
351
Abstract
We demonstrate a through etched subwavelength grating coupler, which can be patterned together with other photonic components. It achieves a very high coupling efficiency of 59% with a 3dB bandwidth of 60 nm.
Keywords
CMOS integrated circuits; diffraction gratings; elemental semiconductors; etching; integrated optics; optical couplers; optical fabrication; silicon; CMOS compatible-subwavelength grating couplers; Si; Silicon Integrated Photonics; efficiency 59 percent; etching; high-coupling efficiency; noise figure 3 dB; photonic components; wavelength 60 nm; Couplers; Couplings; Fabrication; Gratings; Photonics; Silicon; gratings; nanophotonics and photonic crystals; subwavelength structure;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics Conference (IPC), 2012 IEEE
Conference_Location
Burlingame, CA
Print_ISBN
978-1-4577-0731-5
Type
conf
DOI
10.1109/IPCon.2012.6358636
Filename
6358636
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