Title :
On-chip multiplexed photonic gas sensing for the detection of volatile organic compounds
Author :
Xia, Zhixuan ; Eftekhar, Ali Asghar ; Li, Qing ; Adibi, Ali
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
We demonstrate an ultra-compact resonance-based integrated photonic sensor for the detection of multiple gas analytes (VOCs) with high sensitivity. Differential measurements using on-chip references are used to compensate for environmental effects to achieve high accuracy.
Keywords :
gas sensors; integrated optoelectronics; micro-optomechanical devices; micromechanical resonators; microsensors; optical resonators; optical sensors; organic compounds; VOC detection; differential measurements; environmental effects; multiple gas analytes; on-chip multiplexed photonic gas sensing; on-chip references; ultracompact resonance-based integrated photonic sensor; volatile organic compounds; Arrays; Optical resonators; Polymers; Sensors; System-on-a-chip; Temperature measurement; Wavelength measurement; Multiplexed Gas Sensing; Optical Gas Sensing; Temperature Cancellation;
Conference_Titel :
Photonics Conference (IPC), 2012 IEEE
Conference_Location :
Burlingame, CA
Print_ISBN :
978-1-4577-0731-5
DOI :
10.1109/IPCon.2012.6358737
