DocumentCode
578296
Title
High-mobility low-power flexible ZnO thin film transistors on plastic substrates
Author
Takalloo, Saeedeh Ebrahimi ; Servati, Peyman
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of British Columbia, Vancouver, BC, Canada
fYear
2012
fDate
23-27 Sept. 2012
Firstpage
897
Lastpage
898
Abstract
This paper presents a high-mobility low-power ZnO thin film transistor deposited at low temperature on plastic substrates. A mobility of 52 cm2/Vs is achieved for this transistor, signifying its application in flexible electronics and displays.
Keywords
II-VI semiconductors; carrier mobility; flexible electronics; plastics; substrates; thin film transistors; zinc compounds; ZnO; flexible display; flexible electronics; high mobility low power flexible thin film transistor; plastic substrates; Films; Plasma temperature; Silicon; Substrates; Thin film transistors; Zinc oxide; flexible substrate; low temperature deposition; metal oxide semiconductors; thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics Conference (IPC), 2012 IEEE
Conference_Location
Burlingame, CA
Print_ISBN
978-1-4577-0731-5
Type
conf
DOI
10.1109/IPCon.2012.6359284
Filename
6359284
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