• DocumentCode
    578296
  • Title

    High-mobility low-power flexible ZnO thin film transistors on plastic substrates

  • Author

    Takalloo, Saeedeh Ebrahimi ; Servati, Peyman

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of British Columbia, Vancouver, BC, Canada
  • fYear
    2012
  • fDate
    23-27 Sept. 2012
  • Firstpage
    897
  • Lastpage
    898
  • Abstract
    This paper presents a high-mobility low-power ZnO thin film transistor deposited at low temperature on plastic substrates. A mobility of 52 cm2/Vs is achieved for this transistor, signifying its application in flexible electronics and displays.
  • Keywords
    II-VI semiconductors; carrier mobility; flexible electronics; plastics; substrates; thin film transistors; zinc compounds; ZnO; flexible display; flexible electronics; high mobility low power flexible thin film transistor; plastic substrates; Films; Plasma temperature; Silicon; Substrates; Thin film transistors; Zinc oxide; flexible substrate; low temperature deposition; metal oxide semiconductors; thin film transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photonics Conference (IPC), 2012 IEEE
  • Conference_Location
    Burlingame, CA
  • Print_ISBN
    978-1-4577-0731-5
  • Type

    conf

  • DOI
    10.1109/IPCon.2012.6359284
  • Filename
    6359284