Title :
An InP-based generic integration technology platform
Author :
Soares, F.M. ; Janiak, K. ; Seeger, A. ; Broeke, R.G. ; Grote, N.
Author_Institution :
Fraunhofer Heinrich-Hertz Inst., Berlin, Germany
Abstract :
This paper describes an InP foundry for receiver-type photonic-integrated circuits. A low-contrast-, a medium-contrast-, and a high-contrast waveguide is offered to interconnect the various devices. A multi-project wafer has been fabricated containing 7 different designs.
Keywords :
integrated optics; optical fabrication; optical waveguides; InP; InP-based generic integration technology platform; high-contrast waveguide; low-contrast waveguide; medium-contrast waveguide; multi-project wafer; optical fabrication; receiver-type photonic-integrated circuits; Foundries; Layout; Optical device fabrication; Optical ring resonators; Optical waveguides; Photonics;
Conference_Titel :
Photonics Conference (IPC), 2012 IEEE
Conference_Location :
Burlingame, CA
Print_ISBN :
978-1-4577-0731-5
DOI :
10.1109/IPCon.2012.6359288