Title :
Electroless nickel plating on fluoroplastics films using atmospheric pressure nonthermal plasma graft polymerization process
Author :
Kuroki, Tomoyuki ; Tahara, Mitsuru ; Kuwahara, Takuya ; Okubo, Masaaki
Author_Institution :
Osaka Prefecture Univ., Sakai, Japan
Abstract :
Electroless nickel plating and photolithography on a fluoroplastics film, which is treated by atmospheric pressure nonthermal plasma graft polymerization, is investigated. Fluoroplastics such as PFA (perfluoroalkoxy fluoroplastics) and PTFE (polytetrafluoroethylene) are extremely stable, inactive, and hydrophobic. Therefore, it is difficult to apply them to electric circuits without surface treatment. In this study, a low-environmental load surface modification of a PTFE film using an atmospheric nonthermal plasma graft polymerization device that can treat A4-size sample is performed. In addition, electroless nickel plating and photolithography on the treated PTFE film are achieved successfully.
Keywords :
electroless deposition; nickel; photolithography; polymer films; polymerisation; Ni; PFA; PTFE film; atmospheric pressure nonthermal plasma graft polymerization process; electroless nickel plating; fluoroplastics films; hydrophobic; perfluoroalkoxy fluoroplastics; photolithography; polytetrafluoroethylene; Films; Lithography; Photolithography; Plasmas; Polymers; Surface morphology; Surface treatment; Electroless nickel plating; Fluoroplastics films; Graft polymerization; Nonthermal plasma; Surface treatment;
Conference_Titel :
Industry Applications Society Annual Meeting (IAS), 2012 IEEE
Conference_Location :
Las Vegas, NV
Print_ISBN :
978-1-4673-0330-9
Electronic_ISBN :
0197-2618
DOI :
10.1109/IAS.2012.6373982