Title :
Model based control of micro-positioning stages
Author :
Tan, Yonghong ; Xie, Yangqiu ; Dong, Ruili ; He, Hong
Author_Institution :
Coll. of Inf., Mech. & Electr. Eng, Shanghai Normal Univ., Shanghai, China
Abstract :
A model based control scheme for micro-positioning stage with piezoelectric actuators is proposed in this paper. In this scheme, a sandwich model with rate-dependent hysteresis is used to describe the performance of the stage. Then, a nonlinear model based control strategy is developed to enable the displacement of the stage to track the reference trajectory. Moreover, a robust design scheme is discussed. The experimental results obtained by implementing the proposed method are also presented in this paper.
Keywords :
control system synthesis; hysteresis; microactuators; micropositioning; nonlinear control systems; piezoelectric actuators; robust control; trajectory control; micropositioning stage; model based control scheme; nonlinear model based control strategy; piezoelectric actuator; rate dependent hysteresis; robust design scheme; sandwich model; trajectory tracking; Educational institutions; Hysteresis; Integrated circuit modeling; Load modeling; Piezoelectric actuators; Robustness; control; hysteresis; piezoelectric actuator; positioning stage; sandwich model;
Conference_Titel :
Control Conference (CCC), 2012 31st Chinese
Conference_Location :
Hefei
Print_ISBN :
978-1-4673-2581-3
