MEMS vibratory gyroscope with highly programmable capacitive interface circuit

A programmable continuous-time capacitive ASIC for MEMS (Microelectromechanical System) vibratory gyroscope is presented. The programmable readout circuit minimizes process variations including parasitic capacitances and fabrication imperfections. The fabricated ASIC adopts continuous-time chopper-stabilized architecture to achieve low noise characteristics. To cancel the parasitic effects and to improve the temperature response, a continuous-time front-end architecture with digital trimming is proposed. The fabricated capacitive ASIC is evaluated with gyroscope sensing element. The input range and scale factor are ±90 deg/sec and 164 counts/ deg/sec, respectively.