Title :
MEMS vibratory gyroscope with highly programmable capacitive interface circuit
Author :
Seo, Jindeok ; Lim, Kyomook ; Ko, Hyoungho
Author_Institution :
Dept. of Electron., Chungnam Nat. Univ., Daejeon, South Korea
Abstract :
A programmable continuous-time capacitive ASIC for MEMS (Microelectromechanical System) vibratory gyroscope is presented. The programmable readout circuit minimizes process variations including parasitic capacitances and fabrication imperfections. The fabricated ASIC adopts continuous-time chopper-stabilized architecture to achieve low noise characteristics. To cancel the parasitic effects and to improve the temperature response, a continuous-time front-end architecture with digital trimming is proposed. The fabricated capacitive ASIC is evaluated with gyroscope sensing element. The input range and scale factor are ±90 deg/sec and 164 counts/ deg/sec, respectively.
Keywords :
application specific integrated circuits; choppers (circuits); micromechanical devices; programmable circuits; readout electronics; MEMS vibratory gyroscope; continuous-time chopper-stabilized architecture; continuous-time front-end architecture; digital trimming; fabricated ASIC; fabricated capacitive ASIC; fabrication imperfections; gyroscope sensing element; highly programmable capacitive interface circuit; input range; low noise characteristics; microelectromechanical system; parasitic capacitances; parasitic effects; process variations; programmable continuous-time capacitive ASIC; programmable readout circuit; scale factor; temperature response; Capacitance; Capacitors; EPROM; Gyroscopes; Micromechanical devices; Programming; Sensors; Capacitive Interface; Gyroscope; Programmable Circuit;
Conference_Titel :
Control, Automation and Systems (ICCAS), 2012 12th International Conference on
Conference_Location :
JeJu Island
Print_ISBN :
978-1-4673-2247-8
