Development of 4 degree-of-freedom ultra-precision stage with millimeter motion range

High precision positioning is a key technology in various advanced applications. Performances such as longer motion range, nanometer level precision and multiple degree-of freedom(d.o.f) motion within compact size are strongly required recently. In this paper, we proposed and realized new 4 d.o.f ultra-precision stage employing 5 VCMs and 2 flexure guide mechanisms. The non-contact characteristic of the VCM and the flexure is utilized to achieve ultra precision and long motion range simultaneously. The VCMs and the flexure guides were mathematically modeled and optimized to achieve the best performance. The stage was manufactured within compact size of 180 × 180 × 30.7 mm³ and feedback controlled. The experimental results showed the motion range more than 1.80 mm in plane and 0.3 mm vertically and the resolution of 10 nm in plane and 14 nm vertically.