• DocumentCode
    583673
  • Title

    Morphologies of Ag dots printed by electrohydrodynamic (EHD) jet printing on a silicon wafer

  • Author

    Prasetyo, Fariza Dian ; Yudistira, Hadi Teguh ; Nguyen, Vu Dat ; Byun, Doyoung

  • Author_Institution
    Dept. of Mech. Eng., Sungkyunkwan Univ., Suwon, South Korea
  • fYear
    2012
  • fDate
    17-21 Oct. 2012
  • Firstpage
    389
  • Lastpage
    391
  • Abstract
    Recently electrohydrodynamics (EHD) jet printing technology has been one of the main alternatives for micro-scale or nano-scale fabrication and manufacturing of electronic devices. This technology allows us relatively low-cost, simple manufacturing of the thin film transistor or organic devices. The main advantage of EHD jet printing compared with the other conventional inkjet printing technologies is the capability to realize printing below 20 μm of patterning and eject high viscosity ink. In this study, by using drop on demand (DOD) operation of jetting we demonstrated silver (Ag) dots printed on silicon (Si) wafer and investigate the effects of the substrate surface energe and temperature on the dot morphologies. We also investigated the effect of overprinting process on the pattern height and diameter. Our studies showed that we successfully realized below 20 μm of dots pattern by using EHD jet printing. Furthermore, overprinting process and temperature condition during printing process showed effects on dots morphologies.
  • Keywords
    electrohydrodynamics; elemental semiconductors; nanofabrication; silicon; silver; surface morphology; thin film transistors; viscosity; Ag; EHD jet printing; Si; dot morphology; drop on demand operation; electrohydrodynamics jet printing; electronic devices; high viscosity ink; microscale fabrication; nanoscale fabrication; organic devices; overprinting process; silicon wafer; silver dots; substrate surface; temperature condition; thin film transistor; Electrohydrodynamics; Fabrication; Ink; Morphology; Printing; Substrates; US Department of Defense; Dots; Drop-on-demand (DOD); EHD jet printing; Morphologies; Overprinting; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Control, Automation and Systems (ICCAS), 2012 12th International Conference on
  • Conference_Location
    JeJu Island
  • Print_ISBN
    978-1-4673-2247-8
  • Type

    conf

  • Filename
    6393468