DocumentCode
583673
Title
Morphologies of Ag dots printed by electrohydrodynamic (EHD) jet printing on a silicon wafer
Author
Prasetyo, Fariza Dian ; Yudistira, Hadi Teguh ; Nguyen, Vu Dat ; Byun, Doyoung
Author_Institution
Dept. of Mech. Eng., Sungkyunkwan Univ., Suwon, South Korea
fYear
2012
fDate
17-21 Oct. 2012
Firstpage
389
Lastpage
391
Abstract
Recently electrohydrodynamics (EHD) jet printing technology has been one of the main alternatives for micro-scale or nano-scale fabrication and manufacturing of electronic devices. This technology allows us relatively low-cost, simple manufacturing of the thin film transistor or organic devices. The main advantage of EHD jet printing compared with the other conventional inkjet printing technologies is the capability to realize printing below 20 μm of patterning and eject high viscosity ink. In this study, by using drop on demand (DOD) operation of jetting we demonstrated silver (Ag) dots printed on silicon (Si) wafer and investigate the effects of the substrate surface energe and temperature on the dot morphologies. We also investigated the effect of overprinting process on the pattern height and diameter. Our studies showed that we successfully realized below 20 μm of dots pattern by using EHD jet printing. Furthermore, overprinting process and temperature condition during printing process showed effects on dots morphologies.
Keywords
electrohydrodynamics; elemental semiconductors; nanofabrication; silicon; silver; surface morphology; thin film transistors; viscosity; Ag; EHD jet printing; Si; dot morphology; drop on demand operation; electrohydrodynamics jet printing; electronic devices; high viscosity ink; microscale fabrication; nanoscale fabrication; organic devices; overprinting process; silicon wafer; silver dots; substrate surface; temperature condition; thin film transistor; Electrohydrodynamics; Fabrication; Ink; Morphology; Printing; Substrates; US Department of Defense; Dots; Drop-on-demand (DOD); EHD jet printing; Morphologies; Overprinting; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Control, Automation and Systems (ICCAS), 2012 12th International Conference on
Conference_Location
JeJu Island
Print_ISBN
978-1-4673-2247-8
Type
conf
Filename
6393468
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