Experiment research of moving electrode impact on discharge parameters in narrow gap ESD

Experiment with electrostatic discharge(ESD) generator was implemented in two situations of gap state. All discussion in previous literatures on approach speed effect in electrostatic discharge is really the combination of contact mode discharge and air mode discharge because of final collision of electrode with the target. Three kinds of discharge current waveforms are analysed for experiment test results in electrostatic discharge. Approach speed, i.e., moving electrode velocity to the target, only alter charge state on electrode before ESD taking place. The parameters of ESD are affected by special contact electrostatic discharge combination with air discharge.