DocumentCode :
588148
Title :
Total-ionizing-dose radiation response of 32 nm partially and 45 nm fully-depleted SOI devices
Author :
Rezzak, Nadia ; Zhang, E.X. ; Ball, D.R. ; Alles, Michael L. ; Loveless, T.D. ; Schrimpf, R.D. ; Rodbell, Kenneth P.
Author_Institution :
Vanderbilt Univ., Nashville, TN, USA
fYear :
2012
fDate :
1-4 Oct. 2012
Firstpage :
1
Lastpage :
2
Abstract :
TID-induced changes in 32 nm PD SOI devices depend on the device variant: low VT devices show minor increased in leakage, high VT devices show negligible change. Simulated sensitivity of TID to the gate work function of the high-k metal gate and associated doping changes confirm that the body doping remains high and generally mitigates TID sensitivity. Preliminary ring oscillator measurements show no measurable change in supply current or frequency with TID. Specially designed experimental 45 nm SOI FDSOI devices exhibit a pronounced TID-induced VT shift due to the coupling with the BOX layer.
Keywords :
MOSFET; high-k dielectric thin films; radiation hardening (electronics); silicon-on-insulator; work function; BOX layer; NMOS; SOI FDSOI devices; TID simulated sensitivity; TID-induced voltage shift; body doping; fully-depleted SOI devices; gate work function; high-k metal gate; partially-depleted SOI devices; ring oscillator measurements; size 32 nm; size 45 nm; total-ionizing-dose radiation response; Current measurement; Doping profiles; Logic gates; Metals; Semiconductor process modeling; Sensitivity;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
SOI Conference (SOI), 2012 IEEE International
Conference_Location :
NAPA, CA
ISSN :
1078-621X
Print_ISBN :
978-1-4673-2690-2
Electronic_ISBN :
1078-621X
Type :
conf
DOI :
10.1109/SOI.2012.6404374
Filename :
6404374
Link To Document :
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