Title :
Highly (001)-oriented thin continuous L10 FePt films for bit patterned media
Author :
Jung-Wei Liao ; Chung-Fu Cheng ; Ding-Shuo Wang ; Kuo-Feng Huang ; Liang-Wei Wang ; Chih-Huang Lai
fDate :
Oct. 31 2012-Nov. 2 2012
Abstract :
We demonstrate a highly (001)-oriented thin continuous FePt film by introducing an FeOx cap layer. The agglomeration in capped FePt films is significantly suppressed by inhibiting the surface diffusion, which then yields a desired continuous film with a narrowed (001) out-of-plane angular distribution. Through the promoted interdiffusion of Fe and Pt by the reduction of Fe oxides during annealing, we successfully maintain a (001) L10 phase while suppressing the agglomeration in FePt films. By utilizing this continuous FePt film and template of diblock copolymer, we obtain FePt dot arrays with an average dot diameter of 25 nm.
Keywords :
annealing; chemical interdiffusion; metallic thin films; reduction (chemical); surface diffusion; FeOx cap layer; FePt; FePt dot array diameter; FePt film agglomeration; annealing; bit patterned media; diblock copolymer template; highly (001)-oriented thin continuous L10 FePt films; interdiffusion; narrowed (001) out-of-plane angular distribution; oxide reduction; surface diffusion; Annealing; Iron; Magnetic films; Media; L10 FePt; agglomeration; bit patterned media; ordering;
Conference_Titel :
APMRC, 2012 Digest
Conference_Location :
Singapore
Print_ISBN :
978-1-4673-4734-1
