DocumentCode
590351
Title
Gas thermal conductivity measurement based on the three-omega method
Author
Gauthier, S. ; Combette, P. ; Giani, Annarita
Author_Institution
Inst. d´Electron. du Sud, Univ. Montpellier II, Montpellier, France
fYear
2012
fDate
28-31 Oct. 2012
Firstpage
1
Lastpage
4
Abstract
Preliminary investigations have been conducted to discuss the possibility of using a micro-machined suspended wire as a 3ω based sensor for the measurement of gas thermal conductivities. Thermal responses of various pure gases and helium-nitrogen mixtures have been measured using a 3ω setup and compared to an one-dimensional analytical model derived by Yusibani et al. Deviation of the measured thermal conductivities compared to reference values led us to consider an empirical approach which offers the possibility of estimating the studied gas thermal conductivity by measuring the out-of-phase cut-off frequency.
Keywords
gas sensors; micromachining; microsensors; thermal conductivity measurement; 3ω based sensor; 3ω setup; gas thermal conductivity measurement; helium-nitrogen mixtures; micromachined suspended wire; one-dimensional analytical model; out-of-phase cut-off frequency measurement; three-omega method; Conductivity; Conductivity measurement; Frequency measurement; Heating; Temperature measurement; Thermal conductivity; Wires;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2012 IEEE
Conference_Location
Taipei
ISSN
1930-0395
Print_ISBN
978-1-4577-1766-6
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2012.6411023
Filename
6411023
Link To Document