DocumentCode :
590351
Title :
Gas thermal conductivity measurement based on the three-omega method
Author :
Gauthier, S. ; Combette, P. ; Giani, Annarita
Author_Institution :
Inst. d´Electron. du Sud, Univ. Montpellier II, Montpellier, France
fYear :
2012
fDate :
28-31 Oct. 2012
Firstpage :
1
Lastpage :
4
Abstract :
Preliminary investigations have been conducted to discuss the possibility of using a micro-machined suspended wire as a 3ω based sensor for the measurement of gas thermal conductivities. Thermal responses of various pure gases and helium-nitrogen mixtures have been measured using a 3ω setup and compared to an one-dimensional analytical model derived by Yusibani et al. Deviation of the measured thermal conductivities compared to reference values led us to consider an empirical approach which offers the possibility of estimating the studied gas thermal conductivity by measuring the out-of-phase cut-off frequency.
Keywords :
gas sensors; micromachining; microsensors; thermal conductivity measurement; 3ω based sensor; 3ω setup; gas thermal conductivity measurement; helium-nitrogen mixtures; micromachined suspended wire; one-dimensional analytical model; out-of-phase cut-off frequency measurement; three-omega method; Conductivity; Conductivity measurement; Frequency measurement; Heating; Temperature measurement; Thermal conductivity; Wires;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
ISSN :
1930-0395
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
Type :
conf
DOI :
10.1109/ICSENS.2012.6411023
Filename :
6411023
Link To Document :
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