• DocumentCode
    590351
  • Title

    Gas thermal conductivity measurement based on the three-omega method

  • Author

    Gauthier, S. ; Combette, P. ; Giani, Annarita

  • Author_Institution
    Inst. d´Electron. du Sud, Univ. Montpellier II, Montpellier, France
  • fYear
    2012
  • fDate
    28-31 Oct. 2012
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Preliminary investigations have been conducted to discuss the possibility of using a micro-machined suspended wire as a 3ω based sensor for the measurement of gas thermal conductivities. Thermal responses of various pure gases and helium-nitrogen mixtures have been measured using a 3ω setup and compared to an one-dimensional analytical model derived by Yusibani et al. Deviation of the measured thermal conductivities compared to reference values led us to consider an empirical approach which offers the possibility of estimating the studied gas thermal conductivity by measuring the out-of-phase cut-off frequency.
  • Keywords
    gas sensors; micromachining; microsensors; thermal conductivity measurement; 3ω based sensor; 3ω setup; gas thermal conductivity measurement; helium-nitrogen mixtures; micromachined suspended wire; one-dimensional analytical model; out-of-phase cut-off frequency measurement; three-omega method; Conductivity; Conductivity measurement; Frequency measurement; Heating; Temperature measurement; Thermal conductivity; Wires;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2012 IEEE
  • Conference_Location
    Taipei
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4577-1766-6
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2012.6411023
  • Filename
    6411023