DocumentCode
590355
Title
Love wave devices with excellent temperature stability for application in gas sensor
Author
Wang Wen ; Xie Xiao ; Hou Jiaoli ; He Shitang
Author_Institution
Inst. of Acoust., Beijing, China
fYear
2012
fDate
28-31 Oct. 2012
Firstpage
1
Lastpage
4
Abstract
The temperature property of Love wave device for application in gas sensor was analyzed theoretically by solving the coupled electromechanical field equation, and the optimal design parameters were extraction, leading to excellent temperature stability. Low temperature coefficient of the fabricated Love wave delay lines with guide layer of SU-8 on ST-90°X quartz substrate is achieved experimentally as only -4.4 ppm/°C, which agrees well with the calculated results.
Keywords
Love waves; delay lines; gas sensors; Love wave delay line; Love wave device; ST-quartz substrate; SU-8 guide layer; coupled electromechanical field equation; gas sensor; optimal design parameter extraction; temperature stability; Electric potential; Gas detectors; Substrates; Temperature; Temperature measurement; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2012 IEEE
Conference_Location
Taipei
ISSN
1930-0395
Print_ISBN
978-1-4577-1766-6
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2012.6411032
Filename
6411032
Link To Document