Title :
Love wave devices with excellent temperature stability for application in gas sensor
Author :
Wang Wen ; Xie Xiao ; Hou Jiaoli ; He Shitang
Author_Institution :
Inst. of Acoust., Beijing, China
Abstract :
The temperature property of Love wave device for application in gas sensor was analyzed theoretically by solving the coupled electromechanical field equation, and the optimal design parameters were extraction, leading to excellent temperature stability. Low temperature coefficient of the fabricated Love wave delay lines with guide layer of SU-8 on ST-90°X quartz substrate is achieved experimentally as only -4.4 ppm/°C, which agrees well with the calculated results.
Keywords :
Love waves; delay lines; gas sensors; Love wave delay line; Love wave device; ST-quartz substrate; SU-8 guide layer; coupled electromechanical field equation; gas sensor; optimal design parameter extraction; temperature stability; Electric potential; Gas detectors; Substrates; Temperature; Temperature measurement; Temperature sensors;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411032
