A novel integrated tactile image sensor for detection of surface friction and hardness using the reference plane structure

Author

Maeda, Yuji ; Terao, Kyohei ; Suzuki, Takumi ; Shimokawa, Fusao ; Takao, Hidekuni

Author_Institution

Dept. of Intell. Mech. Syst., Kagawa Univ., Takamatsu, Japan

fYear

2012

fDate

28-31 Oct. 2012

Firstpage

1

Lastpage

4

Abstract

In this paper, a tactile sensor with detection abilities of hardness and friction of object surface is proposed and reported. The new detection principles of friction and hardness are realized with the reference plane structure on the device. The device was fabricated with LSI/MEMS integration technology. Completed the devices were evaluated, and the measured normal force sensitivity was 0.07mV/mN/V. On the other hand, the shear force sensitivity was 0.73mV/mN/V. This performance corresponds to the detection ability of frictional coefficient around 0.1. Also, shore A hardness was successfully measured in the range from 22 to 99 HS.

Keywords

image sensors; microfabrication; microsensors; object detection; tactile sensors; LSI-MEMS integration technology; frictional coefficient; hardness detection; integrated tactile image sensor; object surface detection principles; reference plane structure; shear force sensitivity; surface friction detection; Arrays; Force; Force measurement; Friction; Sensitivity; Silicon; Tactile sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2012 IEEE

Conference_Location

Taipei

ISSN

1930-0395

Print_ISBN

978-1-4577-1766-6

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2012.6411053

Filename

6411053