Title :
Fabrication of thin-film WO3 sensors and their sensing properties to dilute NO2
Author :
Zhicong Meng ; Hashishin, T. ; Tamaki, Jeanne ; Kojima, Keisuke
Author_Institution :
Dept. of Appl. Chem., Ritsumeikan Univ., Kusatsu, Japan
Abstract :
We tried to fabricate WO3 thin-film sensors using four kinds of WO3 particles with very different crystalline morphologies (spherical, disk, cuboid, and hexagonal). Using highly dispersive suspensions prepared, WO3 thin films of 1.5-3.0 μm in mean thickness were obtained by micro-injecting film formation method. NO2 sensing properties of these thin-film sensors suggested that the sensitivity to NO2 as well as the rate of response-recovery depended markedly on morphology and microstructure of the WO3 crystals contained.
Keywords :
crystal microstructure; crystal morphology; microfabrication; microsensors; nitrogen compounds; suspensions; thin film sensors; tungsten compounds; NO2; WO3; crystalline morphology; dispersive suspension; microfabrication; microinjecting film formation method; microstructure; size 1.5 mum to 3.0 mum; thin film sensor fabrication; Films; Morphology; Surface morphology; Suspensions; Temperature sensors; Tungsten;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411090
