Fabrication of thin-film WO3 sensors and their sensing properties to dilute NO2

Author

Zhicong Meng ; Hashishin, T. ; Tamaki, Jeanne ; Kojima, Keisuke

Author_Institution

Dept. of Appl. Chem., Ritsumeikan Univ., Kusatsu, Japan

fYear

2012

fDate

28-31 Oct. 2012

Firstpage

1

Lastpage

4

Abstract

We tried to fabricate WO₃ thin-film sensors using four kinds of WO₃ particles with very different crystalline morphologies (spherical, disk, cuboid, and hexagonal). Using highly dispersive suspensions prepared, WO₃ thin films of 1.5-3.0 μm in mean thickness were obtained by micro-injecting film formation method. NO₂ sensing properties of these thin-film sensors suggested that the sensitivity to NO₂ as well as the rate of response-recovery depended markedly on morphology and microstructure of the WO₃ crystals contained.

Keywords

crystal microstructure; crystal morphology; microfabrication; microsensors; nitrogen compounds; suspensions; thin film sensors; tungsten compounds; NO₂; WO₃; crystalline morphology; dispersive suspension; microfabrication; microinjecting film formation method; microstructure; size 1.5 mum to 3.0 mum; thin film sensor fabrication; Films; Morphology; Surface morphology; Suspensions; Temperature sensors; Tungsten;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2012 IEEE

Conference_Location

Taipei

ISSN

1930-0395

Print_ISBN

978-1-4577-1766-6

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2012.6411090

Filename

6411090