Wide-band piezoresistive microphone for aero-acoustic applications

Author

Zhijian Zhou ; Man Wong ; Rufer, Libor ; Salze, E. ; Yuldashev, P. ; Ollivier, S.

Author_Institution

Dept. of Electron. & Comput. Eng., Hong Kong Univ. of Sci. & Technol., Hong Kong, China

fYear

2012

fDate

28-31 Oct. 2012

Firstpage

1

Lastpage

4

Abstract

A surface micro-machined microphone employing recrystallized metal-induced-laterally crystallized (RC-MILC) polycrystalline silicon (Poly-Si) piezoresistor is developed for aero-acoustic applications. A static sensitivity of ~0.4μV/V/Pa is measured using a nano-indentation technique and a useful bandwidth starting from ~100kHz with a resonance peak at ~400kHz has been obtained using shock waves generated using a the high-voltage electrical spark discharge.

Keywords

acoustic measurement; aeroacoustics; micromachining; microphones; piezoresistive devices; shock waves; sparks; aero-acoustic applications; high voltage electrical spark discharge; laterally crystallized polycrystalline silicon piezoresistor; recrystallized metal; shock wave; surface micromachined microphone; wideband piezoresistive microphone; Frequency measurement; Microphones; Optical variables measurement; Resistors; Resonant frequency; Semiconductor device measurement; Sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2012 IEEE

Conference_Location

Taipei

ISSN

1930-0395

Print_ISBN

978-1-4577-1766-6

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2012.6411105

Filename

6411105