Title :
Wide-band piezoresistive microphone for aero-acoustic applications
Author :
Zhijian Zhou ; Man Wong ; Rufer, Libor ; Salze, E. ; Yuldashev, P. ; Ollivier, S.
Author_Institution :
Dept. of Electron. & Comput. Eng., Hong Kong Univ. of Sci. & Technol., Hong Kong, China
Abstract :
A surface micro-machined microphone employing recrystallized metal-induced-laterally crystallized (RC-MILC) polycrystalline silicon (Poly-Si) piezoresistor is developed for aero-acoustic applications. A static sensitivity of ~0.4μV/V/Pa is measured using a nano-indentation technique and a useful bandwidth starting from ~100kHz with a resonance peak at ~400kHz has been obtained using shock waves generated using a the high-voltage electrical spark discharge.
Keywords :
acoustic measurement; aeroacoustics; micromachining; microphones; piezoresistive devices; shock waves; sparks; aero-acoustic applications; high voltage electrical spark discharge; laterally crystallized polycrystalline silicon piezoresistor; recrystallized metal; shock wave; surface micromachined microphone; wideband piezoresistive microphone; Frequency measurement; Microphones; Optical variables measurement; Resistors; Resonant frequency; Semiconductor device measurement; Sensors;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411105
