Title :
Design study of a guided-wave optical microphone with a diaphragm
Author :
Murata, Kentaro ; Ohkawa, Masashi ; Sato, Takao
Author_Institution :
Grad. Sch. of Sci. & Technol., Niigata Univ., Niigata, Japan
Abstract :
Our guided-wave optical microphone consists of a diaphragm and a single-mode optical waveguide on the diaphragm. Since sensitivity and frequency response are strongly dependent on waveguide position and diaphragm dimensions, designing the microphone is relatively complicated without a design guideline. In this report, a convenient and helpful chart diagram when designing the microphone is proposed based on theoretical and experimental results on dependences of sensitivity and resonance frequency on diaphragm dimensions. In addition, since damping of diaphragm vibration is also vital in obtaining a broader flat frequency response, squeeze-film air damping is discussed.
Keywords :
damping; diaphragms; frequency response; microphones; optical films; optical waveguides; vibrations; chart diagram; diaphragm dimension; diaphragm vibration; frequency response; guided-wave optical microphone; resonance frequency dependence; sensitivity frequency dependence; sensitivity response; single-mode optical waveguide position; squeeze-film air damping; Damping; Frequency measurement; Microphones; Optical sensors; Optical waveguides; Resonant frequency; Sensitivity;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411108
