Title :
Active thermal compensation of MEMS based gyroscope
Author :
Sheng-Ren Chiu ; Chung-Yang Sue ; Chih-Hsiou Lin ; Li-Tao Teng ; Lu-Pu Liao ; Yu-Wen Hsu ; Yan-Kuin Su
Author_Institution :
Microsyst. Technol. Center, Ind. Technol. Res. Inst., Tainan, Taiwan
Abstract :
This paper presents a new thermal compensation system for low temperature-bias-drift (TBD) MEMS based gyroscope. The temperature-dependent characteristics of proposed micro-gyroscope are firstly investigated and discussed in this work. The absolute temperature of the gyroscope is obtained by the frequency synthesizer, which is implemented by field programmable gate array (FPGA), in the thermal compensation system. Besides, the digital trimming mechanism, which implemented in CMOS readout ASIC, is actively tuned by the frequency synthesizer such that the temperature-bias-drift of gyrosocpe can be compensated. The experimental results shows that the temperature resolution of thermal compensation system is about 0.2° and the TBD of the uncompensated and compensated gyroscope is about 0.47 DPS/° and ±0.02 DPS/°.
Keywords :
CMOS integrated circuits; application specific integrated circuits; compensation; field programmable gate arrays; frequency synthesizers; gyroscopes; microsensors; readout electronics; temperature sensors; CMOS readout ASIC; FPGA; TBD; absolute temperature; active thermal compensation system; digital trimming mechanism; field programmable gate array; frequency synthesizer; microgyroscope; temperature-bias-drift MEMS based gyroscope; temperature-dependent characteristics; Application specific integrated circuits; Calibration; Clocks; Frequency synthesizers; Gyroscopes; Micromechanical devices; Sensors;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411164
