Title :
CMOS-MEMS accelerometer with differential LC-tank oscillators
Author :
Yi Chiu ; Hao-Chiao Hong ; Po-Chih Wu
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
This paper presents a CMOS-MEMS accelerometer based on differential LC-tank oscillators. Two LC-tank oscillators composed of differential MEMS capacitors and suspended inductors were designed and fabricated by standard TSMC 0.18 μm CMOS processes and post-CMOS dry etching. The outputs of the differential oscillators are mixed and the output frequency of the mixer is proportional to the capacitance change caused by external acceleration. The device has been characterized and has a mechanical resonance frequency of 3.3 kHz, sensitivity of 3.7 MHz/g, and nonlinearity of 1.8%.
Keywords :
CMOS integrated circuits; LC circuits; accelerometers; capacitance measurement; microsensors; mixers (circuits); oscillators; CMOS-MEMS accelerometer; TSMC CMOS process; capacitance; differential LC tank oscillator; frequency 3.3 kHz; mechanical resonance; mixer; postCMOS dry etching; size 0.18 mum; Acceleration; Accelerometers; Frequency measurement; Micromechanical devices; Oscillators; Resonant frequency; Sensitivity;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411327
