A novel N x M array of resonance-based addressable MEMS actuators

We present an electromagnetically actuated MEMS actuator array which can be addressed using resonant vibration triggered by an oscillating signal. Several actuators having different inherent resonant frequencies can be addressed with a single control line. More actuators can be addressed in this manner by using a first set of actuators to control a second set, allowing one to form an N x M actuator array of switches that are controlled by only two address lines. These actuators can be used in any applications requiring multiple devices in bi-state configuration, such as microswitches, micro-mirrors or micro-valves.