Title :
Flexible tactile sensors based on nanoimprinted sub-20 NM piezoelectric copolymer nanograss films
Author :
Chen, Aaron ; Kai-Lun Lin ; Chien-Chong Hong ; Tong-Miin Liou ; Jiann Shieh ; Szu-Hung Chen
Author_Institution :
Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
This paper presents flexible tactile sensors based on nanoimprinted sub-20 nm piezoelectric copolymer nanograss films. The performance of the sensors is significantly affected by surface morphology of sensing materials. In this abstract, we develop non-electrical poling for the developed PVDF-TrFE nanograss, which greatly improve the piezoelectric response, and apply the developed PVDF-TrFE nanograss films as flexible tactile sensors.
Keywords :
nanolithography; nanosensors; piezoelectric thin films; polymer blends; polymer films; surface morphology; tactile sensors; thin film sensors; PVDF-TrFE nanograss; flexible tactile sensor; nanoimprinted piezoelectric copolymer nanograss film; nonelectrical poling; piezoelectric response; sensing material; size 20 nm; surface morphology; Electrodes; Films; Nanoscale devices; Silicon; Surface morphology; Tactile sensors;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411398
