The Design of the Closed-loop Control System of Micro Machined Gyroscope

The open-loop driving circuit of the capacitive micro mechanical gyroscope can be influenced with the changes of environmental factors, so it can´t ensure the amplitude stability of the gyroscope driving mode. So the sensitivity of the open-loop driving gyroscope is very low. In order to improve the sensitivity and stability of the gyroscope, the closed-loop drive control is put forward. The basic idea of the closed-loop drive control is that: it detects the vibration frequency and amplitude of the drive mode and feedbacks to adjust the frequency and amplitude of the drive voltage in order to improve the stability of the gyroscope.