Title :
Development of the miniature hemispherical tilt stage driven by stick-slip motion using piezoelectric actuators
Author :
Shiratori, H. ; Takizawa, Makoto ; Irie, Y. ; Hirata, Shinnosuke ; Aoyama, Hisayuki
Author_Institution :
Dept. of Mech. Eng. & Intell. Syst., Univ. of Electro-Commun., Chofu, Japan
Abstract :
Miniature hemispherical stage has been proposed for improvement of microscopic observation and manipulation. The stage can be rotated in arbitrary direction under a scanning electron microscope. The stage is composed of a hemisphere and three drive units. Besides, the drive unit is composed of a drive ball and two piezoelectric actuators. The drive ball is moved by two piezoelectric actuators, which are orthogonally arranged, in a plane. The movable plane of each drive ball is same as the tangent plane between the hemisphere and each drive ball. The hemisphere on three drive balls is rotated in arbitrary direction by stick-slip motion of each drive ball. The rotational direction of the stage can be controlled by the movable directions of each drive ball. In this paper, the design and fabrication of the small hemispherical stage are described. The rotational directions of the stage are evaluated using a laser autocollimator.
Keywords :
laboratory techniques; micropositioning; piezoelectric actuators; scanning electron microscopy; laser autocollimator; microscopic manipulation; microscopic observation; miniature hemispherical tilt stage; movable plane; piezoelectric actuator; scanning electron microscope; stick-slip motion; Drives; Equations; Permanent magnet motors; Piezoelectric actuators; Scanning electron microscopy; Vectors; microscope stage; piezoelectric element; stick-slip motion;
Conference_Titel :
Mechatronics (MECATRONICS) , 2012 9th France-Japan & 7th Europe-Asia Congress on and Research and Education in Mechatronics (REM), 2012 13th Int'l Workshop on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-4770-9
Electronic_ISBN :
978-1-4673-4771-6
DOI :
10.1109/MECATRONICS.2012.6451017
