Title :
Silicon microring resonator sensors for the detection of volatile organic compounds
Author :
Dongliang Fu ; Qing Liu ; Kee, J.S. ; Mi Kyoung Park
Author_Institution :
Bioelectronics Program, A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
We demonstrate a volatile organic compounds (VOC) gas detection using silicon based microring resonator devices. Polymer is chemically attached to sidewall of silicon waveguide and microring as a cladding layer. Absorption of VOC gases into the polymer film induces a resonance wavelength shift. A detection limit of 10 part per million (ppm) for both toluene and acetone has been achieved.
Keywords :
claddings; elemental semiconductors; gas sensors; micro-optomechanical devices; microcavities; micromechanical resonators; microsensors; optical resonators; optical waveguides; polymer films; silicon; Si; VOC gas absorption; acetone; cladding layer; detection limit; polymer film; resonance wavelength shift; silicon microring resonator sensors; silicon waveguide sidewall; toluene; volatile organic compound gas detection; Annealing; CMOS integrated circuits; Couplings; Plasma temperature; Temperature sensors; Silicon microring resonator; VOC detection; gas sensor;
Conference_Titel :
Photonics Global Conference (PGC), 2012
Conference_Location :
Singapore
Print_ISBN :
978-1-4673-2513-4
DOI :
10.1109/PGC.2012.6458030
