DocumentCode
594359
Title
A new RF MEMS technology enabling tunability for RF front-end RF ohmic relay based on a flexible anchorless membrane
Author
Millet, O.
Author_Institution
Delf MEMS Co., Villeneuve-d´´Ascq, France
fYear
2012
fDate
Oct. 29 2012-Nov. 1 2012
Firstpage
190
Lastpage
192
Abstract
This paper presents a new RF MEMS relay dedicated to mobile applications. The challenges, the MEMS technology & the packaging solution are introduced.
Keywords
electronics packaging; micromechanical devices; relays; RF MEMS relay; RF MEMS technology; RF front-end RF ohmic relay; flexible anchorless membrane; packaging solution; Force; Micromechanical devices; Mobile handsets; Packaging; Radio frequency; Relays; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference (EuMC), 2012 42nd European
Conference_Location
Amsterdam
Print_ISBN
978-1-4673-2215-7
Electronic_ISBN
978-2-87487-026-2
Type
conf
Filename
6459130
Link To Document