• DocumentCode
    594359
  • Title

    A new RF MEMS technology enabling tunability for RF front-end RF ohmic relay based on a flexible anchorless membrane

  • Author

    Millet, O.

  • Author_Institution
    Delf MEMS Co., Villeneuve-d´´Ascq, France
  • fYear
    2012
  • fDate
    Oct. 29 2012-Nov. 1 2012
  • Firstpage
    190
  • Lastpage
    192
  • Abstract
    This paper presents a new RF MEMS relay dedicated to mobile applications. The challenges, the MEMS technology & the packaging solution are introduced.
  • Keywords
    electronics packaging; micromechanical devices; relays; RF MEMS relay; RF MEMS technology; RF front-end RF ohmic relay; flexible anchorless membrane; packaging solution; Force; Micromechanical devices; Mobile handsets; Packaging; Radio frequency; Relays; Switches;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference (EuMC), 2012 42nd European
  • Conference_Location
    Amsterdam
  • Print_ISBN
    978-1-4673-2215-7
  • Electronic_ISBN
    978-2-87487-026-2
  • Type

    conf

  • Filename
    6459130