RF-MEMS enabled power divider with arbitrary power division ratio

Author

Psychogiou, Dimitra ; Zhengan Yang ; Peroulis, Dimitrios

Author_Institution

Lab. for Electromagn. Fields & Microwave Electron. (IFH), ETH Zurich, Zurich, Switzerland

fYear

2012

fDate

Oct. 29 2012-Nov. 1 2012

Firstpage

53

Lastpage

56

Abstract

This paper presents a continuously variable RF power divider/combiner with arbitrary power division ratio. It is based on two series connected quadrature couplers and two MEMS reconfigurable reflective loads. Tuning is achieved by means of an electrostatically actuated thin SOI diaphragm integrated on top of a cavity resonator. For diaphragm deflections between 0 μm and 15 μm this device can actualize a continuously variable RF power division ratio of at least 0.135:1 to 1:0.063 for frequencies between 1.69 GHz and 3.47 GHz while keeping a low insertion loss of less than 0.7 dB.

Keywords

UHF resonators; cavity resonators; micromechanical devices; microwave resonators; power combiners; power dividers; silicon-on-insulator; MEMS reconfigurable reflective loads; RF-MEMS enabled power divider; arbitrary power division ratio; cavity resonator; continuously variable RF power divider-combiner; continuously variable RF power division ratio; diaphragm deflections; electrostatically actuated thin SOI diaphragm; frequency 1.69 GHz to 3.47 GHz; size 0 mum to 15 mum; Admittance; Couplers; Frequency measurement; Loss measurement; Power dividers; Tuning; Voltage measurement; RF-MEMS; power divider; resonator;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference (EuMC), 2012 42nd European

Conference_Location

Amsterdam

Print_ISBN

978-1-4673-2215-7

Electronic_ISBN

978-2-87487-026-2

Type

conf

Filename

6459160