High impedance reflectometer dedicated to non-resonant near-field microwave microscopy

Author

Glay, D. ; El Fellahi, A. ; Lasri, Tuami

Author_Institution

Inst. d´´Electron. de Microelectron. et de Nanotechnol., Villeneuve d´´Ascq, France

fYear

2012

fDate

Oct. 29 2012-Nov. 1 2012

Firstpage

605

Lastpage

608

Abstract

In this paper we present a novel method of near-field microwave microscopy using a high impedance measurement system. The proposed system combines a classical vector network analyzer to a high referenced impedance splitter via impedance matching networks. We show that the resulting high impedance reflectometer associated to a tip probe permits to compensate the limitation of the non-resonant mode by using the frequency diversity.

Keywords

electric impedance measurement; impedance matching; microscopes; microwave reflectometry; network analysers; probes; scanning probe microscopy; classical vector network analyzer; frequency diversity; high impedance measurement system; high impedance reflectometer; high referenced impedance splitter; impedance matching networks; nonresonant near-field microwave microscopy; Capacitance; Impedance; Microscopy; Microwave imaging; Microwave measurements; Microwave theory and techniques; Probes; High impedance; capacity measurement; near-field microscopy; non-resonant; reflectometer;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference (EuMC), 2012 42nd European

Conference_Location

Amsterdam

Print_ISBN

978-1-4673-2215-7

Electronic_ISBN

978-2-87487-026-2

Type

conf

Filename

6459196