DocumentCode
595624
Title
H2 S sensing properties of RGTO grown SnO2 films
Author
Kaur, Manpreet ; Ganapathi, K. ; Ramgir, N.S. ; Datta, Nipu ; Bhattacharya, Surya ; Debnath, A.K. ; Aswal, D.K. ; Gupta, Suneet K.
Author_Institution
Tech. Phys. Div., Bhabha Atomic Res. Centre, Mumbai, India
fYear
2012
fDate
18-21 Dec. 2012
Firstpage
126
Lastpage
129
Abstract
Gas sensing characteristics of tin oxide thin films prepared using rheotaxial growth and thermal oxidation (RGTO) have been investigated as a function of temperature and concentration. These films are found to show maximum response towards H2S at a temperature of 250°C. Sensor response is observed to follow a power law S = A[C]0.7 in concentration range of 1-100 ppm. The response of these films was also tested for other toxic gases and these films were found to show selectivity towards H2S.
Keywords
gas sensors; hydrogen compounds; thin films; tin compounds; H2S; H2S sensing properties; RGTO; SnO2; function of concentration; function of temperature; gas sensing characteristics; rheotaxial growth and thermal oxidation; thin film growth; tin oxide thin films; Films; Gas detectors; Gases; Oxidation; Temperature sensors; Tin; H2S; RGTO; SnO2 film; gas sensing;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensing Technology (ICST), 2012 Sixth International Conference on
Conference_Location
Kolkata
ISSN
2156-8065
Print_ISBN
978-1-4673-2246-1
Type
conf
DOI
10.1109/ICSensT.2012.6461654
Filename
6461654
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