Amorphous-Silicon Inter-Layer Grating Couplers With Metal Mirrors Toward 3-D Interconnection

Author

JoonHyun Kang ; Atsumi, Yuki ; Hayashi, Yasuhiro ; Suzuki, Jun ; Kuno, Yoshinori ; Amemiya, Tomohiro ; Nishiyama, Naoto ; Arai, Shigehisa

Author_Institution

Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo, Japan

Volume

20

Issue

4

fYear

2014

fDate

July-Aug. 2014

Firstpage

317

Lastpage

322

Abstract

Inter-layer grating couplers sandwiched by two metal layers were demonstrated for high coupling efficiency vertical coupling between amorphous-Si:H multi-stacked optical waveguides. A coupling efficiency of 83% was achieved with grating couplers formed on 5 μm wide waveguides separated by 1 μm while theoretical coupling efficiency of 90% was obtained.

Keywords

amorphous semiconductors; diffraction gratings; elemental semiconductors; hydrogen; mirrors; optical couplers; optical interconnections; optical waveguides; silicon; 3D interconnection; Si:H; amorphous-Si:H multistacked optical waveguides; amorphous-silicon interlayer grating couplers; coupling efficiency; metal layers; metal mirrors; size 5 mum; Couplers; Couplings; Gratings; Metals; Mirrors; Optical waveguides; Photonics; Silicon photonics; amorphous-Si:H (a-Si:H) waveguide; grating coupler; metal mirror; multi-layer; vertical coupler;

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/JSTQE.2014.2300058

Filename

6712038