DocumentCode
59608
Title
Reflective displacement sensors with monolithically integrated VCSELs and RCEPDs
Author
Song, Y.M. ; Ju, G.W. ; Choi, H.J. ; Lee, Y.W. ; Na, B.H. ; Lee, Y.T.
Author_Institution
Dept. of Electron. Eng., Pusan Nat. Univ., Busan, South Korea
Volume
51
Issue
10
fYear
2015
fDate
5 14 2015
Firstpage
782
Lastpage
783
Abstract
Micro-scale, reflective-type optical displacement sensors have been developed by monolithic integration of vertical cavity surface-emitting lasers (VCSELs) and resonant cavity-enhanced photodetectors (RCEPDs). This compact sensor (700 × 700 μm) consists of an oxide-confined VCSEL that is surrounded by an RCEPD and can measure the linear distance with a measurement range of ~10 mm, which is comparable to that of conventional displacement sensors. Fabrication details and sensor performances are discussed.
Keywords
displacement measurement; distance measurement; laser cavity resonators; optical sensors; photodetectors; surface emitting lasers; RCEPD; compact sensor; linear distance measurement; microscale reflective-type optical displacement sensors; monolithically integrated VCSEL; resonant cavity-enhanced photodetectors; vertical cavity surface-emitting lasers;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el.2015.0299
Filename
7105459
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