A dual-axis bulk micromachined accelerometer with low cross-sensitivity

This paper introduces a novel dual-axis accelerometer structure with low cross-sensitivity. Devices are designed to be fabricated in the SOIMUMPs process, followed by an in-house release step. The device measures 1 mm × 1 mm with 4 proof masses that are able to sense accelerations in the X and Y axes independently. Simulations show a sensitivity of 25 fF/g with a maximum alignment error of 1.6°. The cross-sensitivity is less than 0.5% and the nonlinearity is 3.7% across the 4 g dynamic range. The rotational motion and Z accelerations have no impact on the device X and Y readings, thanks to the particular geometry and differential nature of the device.