Analysis and development of plate-attached cylindrical rotary-linear ultrasonic motor

Piezoelectric element is the core component of ultrasonic motor utilized to transform electric energy into mechanical energy. And the exciting mode of piezoelectric element has a significant influence on the output characteristics of ultrasonic motor. The vibration characteristics of plate-attached cylindrical rotary-linear ultrasonic motor with driving screw thread pair were analyzed theoretically. In detail, the influence of exciting position and length of PZT plates on the output performance of stator were researched. Simulation confirmation was accomplished to theoretical results by finite element method. A plate-attached cylindrical rotary-linear ultrasonic motor prototype was develop. Based on the virtual instrument technology, a testing system was realized and the prototype motor was tested.