Title :
Experimental demonstration of Fano resonance in microfabricated phononic crystal resonators based on two-dimensional silicon slab
Author :
Nan Wang ; Fu-Li Hsiao ; Tsai, Julius Minglin ; Palaniapan, Moorthi ; Dim-Lee Kwong ; Chengkuo Lee
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
In this paper, we demonstrate the experimental study of Fano resonance in a microfabricated phononic crystal (PnC) resonator by creating defects on a two-dimensional (2-D) silicon PnC slab. Our experimental results show that for this type of PnC resonator, the local resonance mechanism plays a dominant role in the acoustic wave transmission, rather than the non-resonant propagating mechanism.
Keywords :
acoustic wave transmission; crystal resonators; elemental semiconductors; phononic crystals; silicon; Fano resonance; PnC resonator; acoustic wave transmission; microfabricated phononic crystal resonator; two-dimensional silicon slab; Acoustic waves; Cavity resonators; Crystals; Fabry-Perot; Photonic band gap; Silicon; Slabs; Fano resonance; Phononic crystal; resonator;
Conference_Titel :
Nanoelectronics Conference (INEC), 2013 IEEE 5th International
Conference_Location :
Singapore
Print_ISBN :
978-1-4673-4840-9
Electronic_ISBN :
2159-3523
DOI :
10.1109/INEC.2013.6465966
