Accurate numerical model for surface scattering, grain boundary scattering, and anomalous skin effect of copper wires

In this paper we have studied both DC size effect and anomalous skin effect caused by surface and grain boundary scattering on the resistivity of Cu thin films by a Monte Carlo method. Contribution of each scattering mechanism and the interaction between them are analyzed separately. A simple and fast numerical recursive method is also introduced to guess the structure of electric field and distribution of current inside the thin film to evaluate the surface resistance instead of complicated analytical formulas.