Accurate numerical model for surface scattering, grain boundary scattering, and anomalous skin effect of copper wires

Author

Abbaspour, E. ; Sarvari, Reza ; Akbarzadeh, Alireza ; Rostami, Mohamad

Author_Institution

Sharif Univ. of Technol., Tehran, Iran

fYear

2013

fDate

2-4 Jan. 2013

Firstpage

209

Lastpage

210

Abstract

In this paper we have studied both DC size effect and anomalous skin effect caused by surface and grain boundary scattering on the resistivity of Cu thin films by a Monte Carlo method. Contribution of each scattering mechanism and the interaction between them are analyzed separately. A simple and fast numerical recursive method is also introduced to guess the structure of electric field and distribution of current inside the thin film to evaluate the surface resistance instead of complicated analytical formulas.

Keywords

Monte Carlo methods; anomalous skin effect; copper; electrical resistivity; grain boundaries; metallic thin films; size effect; surface resistance; surface scattering; Cu; DC size effect; Monte Carlo method; analytical formulas; anomalous skin effect; copper thin films; copper wires; electric field; electrical resistivity; grain boundary scattering; numerical model; numerical recursive method; surface resistance; surface scattering; Conductivity; Electric fields; Films; Grain boundaries; Phonons; Scattering; Skin effect;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanoelectronics Conference (INEC), 2013 IEEE 5th International

Conference_Location

Singapore

ISSN

2159-3523

Print_ISBN

978-1-4673-4840-9

Electronic_ISBN

2159-3523

Type

conf

DOI

10.1109/INEC.2013.6466000

Filename

6466000