Title :
In-situ observation of temperature distribution of microheaters using near-infrared CCD imaging system
Author :
Saito, Takashi ; Weichih Lin ; Atsumo, I. ; Shirakashi, J.
Author_Institution :
Dept. of Electr. & Electron. Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan
Abstract :
Temperature distribution of microheaters during electromigration (EM) was observed by near-infrared (NIR) charge coupled device (CCD) imaging system. The temperature of the hot spot, located at the tip of the microheater, was well controlled with varying the applied voltage. Microheaters were broken during EM processes, and breakdown region clearly corresponded to the position of the hot spot. These results imply that NIR CCD imaging system is a useful tool for the investigation of the temperature distribution of microheaters.
Keywords :
CCD image sensors; electromigration; temperature distribution; EM; charge coupled device; electromigration; in-situ observation; microheaters; near-infrared CCD imaging system; temperature distribution; Charge coupled devices; Gold; Heating; Imaging; Temperature distribution; Temperature measurement; Wires; CCD and EM; NIR; in-situ observation; microheater; thermal distribution;
Conference_Titel :
Nanoelectronics Conference (INEC), 2013 IEEE 5th International
Conference_Location :
Singapore
Print_ISBN :
978-1-4673-4840-9
Electronic_ISBN :
2159-3523
DOI :
10.1109/INEC.2013.6466079
