Title :
A control and readout circuit with capacitive mismatch auto-compensation for MEMS vibratory gyroscope
Author :
Ran Fang ; Wengao Lu ; Tingting Tao ; Guannan Wang ; Zhongjian Chen ; Yacong Zhang ; Dunshan Yu
Author_Institution :
Dept. of Microelectron., Peking Univ., Beijing, China
fDate :
Oct. 29 2012-Nov. 1 2012
Abstract :
In this paper, a control and readout circuit for MEMS vibratory gyroscope is described, including closed- loop driving axis and open-loop sensing axis. Capacitive mismatch auto-compensation has been implemented in this system to suppress the influence to the output due to the mismatch of gyroscope capacitors. The ASIC is fabricated in a 0.35um CMOS process. The test of the ASIC is performed with a MEMS vibratory gyroscope. The test result shows that the non-linearity is less than 0.1% within angular velocity range of -300°/s to 300°/s.
Keywords :
CMOS integrated circuits; application specific integrated circuits; capacitors; gyroscopes; micromechanical devices; ASIC; CMOS process; MEMS vibratory gyroscope; capacitive mismatch autocompensation; closed- loop driving axis; control-readout circuit; gyroscope capacitors; open-loop sensing axis; size 0.35 mum; Angular velocity; Application specific integrated circuits; Capacitors; Gyroscopes; Micromechanical devices; Resonant frequency; Sensors;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2012 IEEE 11th International Conference on
Conference_Location :
Xi´an
Print_ISBN :
978-1-4673-2474-8
DOI :
10.1109/ICSICT.2012.6467587
