A closed-loop system with DC sensing method for vibratory gyroscopes

Author

Tingting Tao ; Wengao Lu ; Ran Fang ; Yacong Zhang ; Zhongjian Chen

Author_Institution

Dept. of Microelectron., Peking Univ., Beijing, China

fYear

2012

fDate

Oct. 29 2012-Nov. 1 2012

Firstpage

1

Lastpage

3

Abstract

The paper presents a closed-loop system scheme with DC sensing method for vibratory gyroscopes. A DC sensing method is employed to convert the amplitude-modulated capacitive signal to voltage. The system realizes a closed-loop control in the driving mode. A high voltage (HV) drive signal which is compatible with the gyro is obtained by the on-chip level shifter. The ASIC occupies 2.5×2.0mm² in a 0.35μm BCD process. The system requires a differential supply of ±12V and can work under a resonant frequency from 3 to 10 kHz.

Keywords

application specific integrated circuits; gyroscopes; microsensors; ASIC; DC sensing method; amplitude-modulated capacitive signal to voltage; closed-loop system; frequency 3 kHz to 10 kHz; high voltage drive signal; on-chip level shifter; vibratory gyroscopes; Application specific integrated circuits; Gyroscopes; Micromechanical devices; Noise; Oscillators; Resonant frequency; Sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuit Technology (ICSICT), 2012 IEEE 11th International Conference on

Conference_Location

Xi´an

Print_ISBN

978-1-4673-2474-8

Type

conf

DOI

10.1109/ICSICT.2012.6467692

Filename

6467692