Title :
Dielectric relaxation of lanthanide-based ternary oxides
Author :
Ce Zhou Zhao ; Tao, Jie ; Chun Zhao ; Werner, Michael ; Taylor, Stephen ; Chalker, P.R.
Author_Institution :
Dept. of Electr. & Electron. Eng., Xi´an Jiaotong-Liverpool Univ., Suzhou, China
fDate :
Oct. 29 2012-Nov. 1 2012
Abstract :
Frequency dispersion in lanthanide-based ternary oxides is often observed in capacitance-voltage (C-V) measurements. The frequency dependence of the dielectric constant (k-value), that is the intrinsic frequency dispersion (dielectric relaxation), could not be assessed before suppressing the effects of extrinsic frequency dispersion, such as the effects of the lossy interfacial layer (between the lanthanide-based ternary oxide and silicon substrate) and the parasitic effects. After taking extrinsic frequency dispersion into account, the relaxation behavior can be modeled using the Havriliak-Negami (HN) relationship. Dielectric relaxation mechanisms are also discussed.
Keywords :
aluminium compounds; capacitance measurement; cerium compounds; dielectric relaxation; hafnium compounds; high-k dielectric thin films; lanthanum compounds; permittivity; voltage measurement; zirconium compounds; C-V measurements; CexHf1-xO2-δ; HN relationship; Havriliak-Negami relationship; LaxZr1-xO2-δ; LaAlO3; capacitance-voltage measurements; dielectric constant frequency dependence; dielectric relaxation mechanisms; effect suppression; extrinsic frequency dispersion; intrinsic frequency dispersion; lanthanide-based ternary oxides; lossy interfacial layer; parasitic effects; relaxation behavior; Capacitance-voltage characteristics; Dielectrics; Dispersion; Equations; Frequency measurement; High K dielectric materials; Mathematical model;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2012 IEEE 11th International Conference on
Conference_Location :
Xi´an
Print_ISBN :
978-1-4673-2474-8
DOI :
10.1109/ICSICT.2012.6467814