Polysilicon wire inorporated with mixture of silica nanoparticles/γ-APTES nanocomposite prepared by UV-assisted liquid phase deposition for pH sensing

The aim of this report focuses on the film growth of 3-aminopropyltriethoxysilane (γ-APTES) mixed with polydimethylsiloxane (PDMS)-treated silica nanoparticles (NPs) by liquid phase deposition (LPD) for sensor applications, investigating the sensing property of the film as well as the effect of ultraviolet (UV) light exposure during the film preparation process. The reason for depositing the γ-APTES+NPs composite film by LPD method is hoping that we can fabricate the biomedical sensors array by batch production. In this work, it was found that the γ-APTES+NPs film showed the most sensitive in pH detections when the UV light illumination was conducted at the initial stage of film deposition. Fourier transform infrared (FTIR) spectroscopy was used to identify the incorporation of silica NPs with γ-APTES, forming nanocomposite structure prepared by using LPD method.