Title :
Electromechanical response simulation of Film Bulk Acoustic wave resonator
Author :
Serhane, Rafik ; Boutkedjirt, Tarek ; Hassein Bey, Abdelkader
Author_Institution :
Division Microélectronique et Nanotechnologie, Centre de Développement des Technologies Avancées (CDTA), 20 Août 1956, Baba Hassen, Algiers DZ-16303, BP: 17, Algeria
Abstract :
The FBAR (Film Bulk Acoustic Resonator) is an ultrasonic transducer consisting of a piezoelectric film which is taken as sandwich between two planar metallic electrodes. The lateral dimensions of this MEMS (Micro Electro Machinated System) are considered very large compared to its thickness [1–3].
Keywords :
FBAR; FEM; MEMS; SILVACO; Ultrasonic transducer; piezoelectricity;
Conference_Titel :
Microelectronics (ICM), 2012 24th International Conference on
Conference_Location :
Algiers, Algeria
Print_ISBN :
978-1-4673-5289-5
DOI :
10.1109/ICM.2012.6471442
