Title :
Effects of Au catalyst on GaAs (111)B surface during annealing
Author :
Liao, Z.M. ; Xu, H.Y. ; Sun, Wen ; Guo, Y.N. ; Yang, Lei ; Chen, Z.G. ; Zou, Jingxin ; Lu, Z.Y. ; Chen, P.P. ; Lu, Wenchao
Author_Institution :
Mater. Eng., Univ. of Queensland, Brisbane, QLD, Australia
Abstract :
To understand the growth mechanism and the effect of catalysts in growing III-V epitaxial nanowires, GaAs (111)B substrates with Au thin films were annealed in a molecular beam epitaxy (MBE) system. Scanning/transmission electron microscopy (SEM/TEM) investigations indicate that, during annealing, the Au catalysts were formed and affect significantly the surface morphology of the GaAs substrates.
Keywords :
annealing; catalysts; gallium arsenide; molecular beam epitaxial growth; nanowires; scanning electron microscopy; surface morphology; transmission electron microscopy; GaAs; III-V epitaxial nanowires; MBE system; SEM; TEM; annealing; catalyst; molecular beam epitaxy; scanning electron microscopy; surface morphology; transmission electron microscopy; Annealing; Gallium arsenide; Gold; Nanowires; Scanning electron microscopy; Substrates; Surface morphology;
Conference_Titel :
Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2012 Conference on
Conference_Location :
Melbourne, VIC
Print_ISBN :
978-1-4673-3047-3
DOI :
10.1109/COMMAD.2012.6472333
