Title :
Control of chemical composition of rare-earth substituted iron garnets using biased target deposition
Author :
Krishnan, Nachimuthu ; Martyniuk, M. ; Jeffery, R.D. ; Woodward, R.C. ; Dell, J.M. ; Faraone, L.
Author_Institution :
Sch. of Electr., Electron. & Comput. Eng., Univ. of Western Australia, Crawley, WA, Australia
Abstract :
Rare earth cerium substituted europium iron garnets (CeEu)3(FeGa)5O12 (Ce:EIG) as well as the elemental oxides were deposited on fused quartz substrates using Biased Target Deposition (BTD). The Ce:EIG films are prepared at low temperature (80-120°C) by sputtering four metallic targets simultaneously using a low energy ion beam. This method provides control over the material composition in a predictable way by controlling the bias duty cycle on individual targets.
Keywords :
cerium compounds; europium compounds; iron compounds; sputter deposition; thin films; (CeEu)3(FeGa)5O12; SiO2; biased target deposition; chemical composition; elemental oxides; fused quartz substrates; rare-earth substituted iron garnets; sputtering; temperature 80 degC to 120 degC; thin films; Australia; Films; Garnets; Iron; X-ray scattering;
Conference_Titel :
Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2012 Conference on
Conference_Location :
Melbourne, VIC
Print_ISBN :
978-1-4673-3047-3
DOI :
10.1109/COMMAD.2012.6472377
